rexresearch
Rustum ROY, et al.
Pure E or H Field Microwave
Metallurgy

Rustum Roy (July 3, 1924 - August 26, 2010) was a materials
scientist who held visiting professorships in materials
science at Arizona State University and in medicine at the
University of Arizona, as well as an emeritus position at
Pennsylvania State University in three departments. He
described himself as a science policy analyst, advocate of
interdisciplinary education and alternative medicine, and
science and religion.
Education and career
Roy was born in Ranchi, Bihar Province, India. In 1942 he
received BS in Physical Chemistry from Patna University and
in 1944 his MS from the same university. He earned a Ph.D.
in ceramics at Penn State in 1948, and became an American
citizen in 1961. He had a long career at Penn State in
geochemistry and materials science. He founded the Materials
Science Laboratory at Penn State and authored hundreds of
technical papers. Roy was a member of the National Academy
of Engineering. Publishing in a journal for which he was
editor-in-chief, he wrote about the relevance of the
structure of water to homeopathy[1] which he defended from
'Homeophobia' by letter to The Guardian.[2] He referred to
himself as a "citizen scientist."
Awards and honors
Evan Pugh Professor of the Solid State Emeritus
Professor of Geochemistry Emeritus
Professor of Science, Technology, and Society Emeritus
Honorary Member, Ceramic Society of Japan 1991
Foreign Member, Royal Swedish Academy of Engineering
Sciences, elected 1977
Foreign Fellow, Indian National Science Academy, elected
1984
Honorary Fellow, Indian Academy of Sciences, 1990
Foreign Associate, Engineering Academy of Japan, Foreign
Associate 1991
Foreign Member, Academy of Russian Sciences Foreign Member;
elected 1999
Ceramic Society of Japan (Centennial) International Award,
1991
Mineralological Society of America Award 1957
Federation of Materials Societies, National Materials
Advancement Award 1991
American Chemical Society DuPont Award in Chemistry of
Materials, 1993
American Society for Engineering Education, Centennial
Medal, 1993; Installed in Hall of Fame, 1993 (one of 43 in
100 years).
Order of the Rising Sun, 3rd Class, Gold Rays with Neck
Ribbon, 2002.[3]
Other activities
Roy served as a Visiting Fellow at the Institute for Policy
Studies (198085) and Senior Policy Fellow at the Brookings
Institution (198283). He was on the Planning and Strategy
Committee of the National Council of Churches from 196470.
He worked with Andrew Weil's program in integrative medicine
and whole person healing at the University of Arizona.
Bibliography
with coauthor Della Roy, Honest Sex (1969), Signet Press,
Author's Choice Press 2003 reprint: ISBN 0-595-27213-4
(contributor), Materials Science and Engineering in the
United States: Proceedings (1970) Penn State U. Press ISBN
0-271-00101-1
Experimenting With Truth: The Fusion of Religion With
Technology Needed for Humanity's Survival (1980), Pergamon
Press, ISBN 0-08-025820-4, the 1979 Hibbert Lectures
Radioactive Waste (1982), Pergamon Press, ISBN 0-08-027541-9
Lost at the Frontier: U.S. Science and Technology Policy
Adrift (1985), ISI Press, ISBN 0-89495-042-8
(co-editor), Materials Science and Engineering Serving
Society (1998), Elsevier Science, ISBN 0-444-82793-5
(editor), The Interdisciplinary Imperative: Interactive
Research and Education, Still an Elusive Goal in Academia
(2000), Writers Club Press, ISBN 0-595-01179-9
Science of Whole Person Healing:
Proceedings of the First Interdisciplinary International
Conference (2003), iUniverse, ISBN 0-595-30153-3
Observations & Studies of the Healing Efficacy of the
Life Vessel (2009) [2]
Biography
Phoebe Forrest Link, Passionate Realist: Rustum Roy In Our
Life And Time (1994), Cricklewood Press, ISBN 0-9643077-0-7
References
Roy R. (2005) The Structure of Liquid Water; Novel Insights
from Materials Research; Potential Relevance to Homeopathy.
Material Research Innovations. 9 (4), pg 577-608.[1]
Roy, Rustum (2007-12-19). "'Homeophobia must not be
tolerated'". The Guardian.
http://www.guardian.co.uk/commentisfree/2007/dec/19/comment.health.
Retrieved 2008-02-24.
Retrieved from
"http://en.wikipedia.org/w/index.php?title=Rustum_Roy&oldid=498020183"
Mat. Res. Innovat. (
2002 ) 6 : 128 - 140
Definitive
Experimental Evidence for Radically New Effects of
Separated E & H Fields,
such as decrystalization of oxides in seconds
Radha Roy, et al.
http://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=7999650
Journal of Materials Research
Volume 17 / Issue 12 / 2002 , pp
3008-3011
Major
phase transformations and magnetic property changes caused
by electromagnetic fields at microwave frequencies
Rustum Roya1, Ramesh Peelamedu,
Craig Grimes, Jiping Chenga1 and Dinesh Agrawal
Materials Research Institute, The
Pennsylvania State University, University Park, Pennsylvania
16802
Abstract
We demonstrate in this paper that common crystalline phases can
be made noncrystalline and hard magnets can be converted to soft
magnets in the solid state in several seconds at temperatures
far below the melting points. New crystal structures and
magnetic structures of ferromagnetic oxides (ferrites such as
BaFe12O19, CoFe2O4, Fe3O4, and ZnFe2O4, etc.) are formed by
reacting either the stoichiometric mixture of oxides or the
preformed phase-pure crystalline material in a pure H field (or
E field) at microwave (2.45 GHz) frequencies. These major
changes in the magnetic properties as well as major structural
phase changes are caused by the magnetic field.
(Received June 29 2002)
New Roles
for Electric and Magnetic Fields in Processing,
Microstructure Evolution, and Performance of Materials:
New "EM" and Human Intentions as Polarized Vector Fields
Program Organizers: Rishi Raj, Univ of Colorado; Rustum Roy,
Pennsylvania State University; Dinesh Agrawal, Pennsylvania
State University
Wednesday 10:00 AM
October 28, 2009
Survey of Novel Directed
Microwave Fields (EMR) on Condensed Matter
Tania Slawecki1; Manju Rao1; Rustum
Roy1; L. Cross1; Nicholas Kuzmik2; James Cornwell2; 1Penn
State University; 2Protective Systems, Inc.
Directed-energy high power
microwaves have been harnessed for weaponry, but not for useful
commercial applications. The standard configuration consists of
a power supply, magnetron and horn antenna. Modifications of
this configuration described by Cornwell, produced a radiation
which has radically new effects on materials. We report the
effects of 915 MHz and 2.45 GHz directed fields, conventional
versus modified, on a wide-range of materials, liquids and
solids, and consider prospects for their use.
Dramatic Structuring of Water
using Polarized Microwave and Radiofrequency Radiation, and
Crystal-induced Epitaxy
Manju Rao1; G. Patrick Flanagan2; Rustum Roy3; Tania Slawecki3;
Steven Sedlmayr4; 1Materials Research Institute; 2Phi Sciences;
3Pennsylvania State University; 4Sedlmayr Associates, LLC
Polarized radiation and epitaxy are presented here as key
vectors for structuring water.
Raman spectroscopy reveals that liquid water treated with 2.45
GHz polarized microwave and 13.56 MHz radiofrequency radiation
undergoes dramatic structural changes, including striking
reduction in the main O-H stretching modes which relax to normal
on the order of several hours, while other structural
changes persist for days or weeks.
Water containing small amounts of NaCl in presence of a
polarized radiofrequency fields, causes an unpredicted
electrodeless dissociation of water, splitting the O-H bond to
generate nascent hydrogen and oxygen, which can be burned,
and/or which can spontaneously ignite.
For epitaxial structuring, water properties, including surface
tension and viscosity, have been altered using macroscopic,
large, ultrahard phases: corundum, diamond and quartz crystals.
This led to the development of a silica gel sol that is used in
industrial applications and in the health industry.
US2009183597
Metal Extraction from Various Chalcogenide Minerals... with
Separate Electric Fields and Magnetic Fields
[ PDF
]
Inventor(s): ROY RUSTUM [US]; MOELLER
WILLIAM [US] + (ROY RUSTUM, ; MOELLER WILLIAM)
Applicant(s): CLIFTON MINING COMPANY [US] +
(CLIFTON MINING COMPANY, ; AMERICAN BIOTECH LABS, LLC)
Classification: - international:
C22B11/00 - European:
B02C19/18; C22B1/00; C22B11/00; C22B11/04; C22B3/06; C22B4/00
Also published as:
US7850759 // WO2008147420
MICROWAVE PROCESSING IN PURE H FIELDS AND PURE E
FIELDS
Inventor(s): ROY RUSTUM [US]; CHENG JIPING
[US]; AGRAWAL DINESH K [US] + (ROY, RUSTUM, ; CHENG, JIPING, ;
AGRAWAL, DINESH, K)
Applicant(s): PENN STATE RES FOUND [US]; ROY
RUSTUM [US]; CHENG JIPING [US]; AGRAWAL DINESH K [US] + (THE
PENN STATE RESEARCH FOUNDATION, ; ROY, RUSTUM, ; CHENG, JIPING,
; AGRAWAL, DINESH, K)
Classification: - international: C04B35/64;
H05B6/80; (IPC1-7): H01L21/326; H05B6/64; H05B6/74 - European:
C04B35/64; H05B6/80
Also published as: US6365885
(B1) // AU8027800 (A)
Abstract -- A process for
heating a material (30) includes providing a microwave radiation
source (14) and a processing chamber (12). The process includes
generating a region of pure magnetic field from the microwave
radiation in the processing chamber (12). A region of pure
electric field from the microwave radiation is also generated.
The material (30) is positioned in the region of pure magnetic
field while no portion of the material is positioned in the
region of pure electric field and the material is heated in the
region of pure magnetic field. The heating may be conducted to
sinter the material (30) which may include a metal.
Technical Field
The present invention relates to methods for processing
materials in the presence of microwave energy.
Background
Application of microwave energy to process various kinds of
materials in an efficient, economic, and effective matter, is
emerging as an innovative technology.
Microwave heating of materials is fundamentally different from
conventional radiation-conduction-convection heating. In the
microwave process, the heat is generated internally within the
material instead of originating from external heating sources.
Microwave heating is a sensitive function of the material being
processed.
Microwaves are electromagnetic radiation with wavelengths
ranging from 1 mm to 1 m in free space and frequency between
approximately 300 GHz to 300
MHz, respectively. Today, microwaves at the 2.45 GHz frequency
are used almost universally for industrial and scientific
applications. The microwaves can be transmitted, absorbed, or
reflected, depending on the material type with which they
interact.
In conventional sintering processes, extremely high
temperatures, long processing times and, in some cases, hot
pressing or hot isostatic processing must be applied in the
fabrication of products to achieve the highest density and
minimum porosity. Conventional powder processing involves the
compaction of a powder into the desired shape following by
sintering. Typically, powders in the range of 1 to 120
micrometers are employed. The powder is placed in a mold and
compacted by applying pressure to the mold. The powder compact
is porous. Its density depends upon the compaction pressure and
the resistance of the particles to deformation.
The powder compact is then heated to promote bonding of the
powder particles. The sintering temperature is such as to cause
atomic diffusion and neck formation between the powder
particles. The diffusion process can yield a substantially dense
body upon completion of the sintering cycle. Such a process is
used in industry for a variety of products and applications.
Microwave sintering processes have unique advantages over
conventional sintering processes. The fundamental difference is
in the heating mechanism. In conventional heating, heat is
generated by heating elements (resistive heating) and then
transferred to samples via radiation, conduction and convection.
In microwave heating, sample materials themselves absorb
microwave power and then transform microwave energy to heat
within the sample volume.
The use of microwave processing typically reduces sintering time
by a factor of 10 or more. This minimizes grain growth. The fine
initial microstructure can be retained without using grain
growth inhibitors and hence achieve high mechanical strength.
The heating rates for a typical microwave process are high and
the overall cycle times are reduced by similar amounts as with
the process sintering time, for example from hours/days to
minutes. Microwave processing of materials has the potential to
yield products having improved mechanical properties with
additional benefits of short processing times and low energy
usage.
Typical microwave processing procedures utilize a mixed electric
field and magnetic field condition, with the sample placed into
a chamber where it is exposed to both the electric field and the
magnetic field generated by the microwaves.
Cherrardi et al., in Electroceramics IV. Vol. II, (eds. Wasner,
R., Hoffmann, S.,Bonnenberg, D., & Hoffmann, C.) RWTN,
Aachen, 1219-1224 (1994), published a paper indicating that both
the magnetic field and electric field may contribute to the
sintering of certain materials.
Summary
One embodiment relates to a process including providing a
microwave radiation source and a processing chamber. The process
includes generating a region of pure magnetic field from the
microwave radiation in the processing chamber. A region of pure
electric field from the microwave radiation is also generated. A
material is positioned in the region of pure magnetic field
while no portion of the material is positioned in the region of
pure electric field, and the material is heated in the region of
pure magnetic field. In one aspect of certain related
embodiments, the heating is conducted to sinter the material. In
another aspect of certain related embodiments, the material
includes a metal.
Another embodiment relates to a method including providing a
microwave radiation source and a processing chamber. A first
region of maximum magnetic field from the microwave radiation is
generated in the processing chamber, and a second region of
maximum electric field from the microwave radiation is generated
in the processing chamber. A body is positioned in only one of
the first region and the second region during a first time
period. The body is positioned in the other of the first region
and the second region during a second time period. In an aspect
of certain related embodiments, a first portion of the body is
heated during the first time period and a second portion of the
body is heated during the second time period, wherein during the
first time period the first portion is heated to a higher
temperature than the second portion, and during the second time
period the second portion is heated to a higher temperature than
the first portion.
Another embodiment relates to a method for heating including
providing a substrate having a layer of material thereon. One of
the substrate and the layer is positioned in one pure field
selected from the group consisting of a microwave generated pure
magnetic field and a microwave generated pure electric field,
during a first time period. The one of the substrate and the
layer is heated layer to a temperature greater than that of the
other.
Brief Description of the Drawings
Certain embodiments of the invention are described with
reference to the accompanying figures which, for illustrative
purposes, are not necessarily drawn to scale.
Fig. 1 is a schematic of a
microwave system used for processing materials in magnetic and
electric fields.
Figs. 2 (a) is a top sectional view
of the cavity of the microwave system including a quartz tube
therein.
Fig. 2 (b) is a view along the line
A-A of Fig. 2 (a).
Fig. 2 (c) is a side sectional view
illustrating a sample positioned in the electric field region
and the location of the temperature monitor.
Fig. 2 (d) illustrates the
microwave field distribution within the TE, 03 single mode
microwave cavity along the length a shown in Fig. 2 (b) and
sample locations in the maximum magnetic H field region and
the maximum electric E field region.
Fig. 3 (a) illustrates a comparison
of the heating rates of powdered metal compact (Fe-2% Cu-0.8%
C) samples in different microwave fields.
Fig. 3 (b) illustrates a comparison
of the heating rates of cobalt powder compact samples in
different microwave fields.
Fig. 3 (c) illustrates a comparison
of the heating rates of copper powder compact samples in
different microwave fields.
Fig. 3 (d) illustrates a comparison
of the heating rates of solid copper rod samples in different
microwave fields.
Fig. 3 (e) illustrates a comparison
of the heating rates of alumina powder compact samples in
different microwave fields.
Fig. 3 (f) illustrates a comparison
of the heating rates of tungsten carbide powder-compact
samples in different microwave fields.
Fig. 3 (g) illustrates a comparison
of the heating rates of alumina-metal composite powder-compact
samples in different microwave fields.
Fig. 3 (h) illustrates a comparison
of the heating rates of tungsten carbide cobalt powder-compact
samples in different microwave fields.
Fig. 4 illustrates the sintering of
a pure Cu powder metal compact including a fully sintered
core, a partially sintered interlayer and a surface layer.
Fig. 5 illustrates an example of
microwave heating of a Fe-Cu-C powder compact metal sample in
a magnetic field region according to an embodiment of the
present invention.
Detailed Description
Fig. 1 illustrates a microwave system 10 including a finely
tuned waveguided cavity 12 with a cross-sectional area of 86mm
by 43 mm which works in TE, 03 single mode which was used to
investigate the microwave heating of several materials in
different microwave fields using a 2.45 GHz, 1.2 kW microwave
generator 14 (Toshiba, Japan). The system also includes a
circulator and water dummy load 16, a frequency tuner 18,
microwave power monitor 18, and temperature monitor 20 (infrared
pyrometer from Mikron Instrument Co., Model
M90-BT with a temperature range of-50 C to 1000 C) connected to
the cavity 12.
A gas supply may also be connected for atmospheric control.
Figs. 2 (a)-2 (d) illustrates the cavity 12 in more detail. The
cavity is rectangular in cross-section and has a length a = 12.4
cm. A quartz tube 22 is positioned in the cavity 12 to hold the
sample 30 and to permit easy atmospheric control. As seen in
Figs. 2 (a) and 2 (b), the samples may be positioned at location
(a) at the center of the chamber or at position (b) at the side
wall of the cavity. Fig. 2 (c) illustrates the position of the
temperature monitor 20 when a sample 30 is positioned in the
electric field region. Fig. 2 (d) shows the electric field E and
magnetic field H distributions along the length a (as seen in
Fig. 2 (b) of the chamber. In the location halfway along the
length of the cavity, the maximum electric field is in the
center of the cross-section, where the magnetic field is a
minimum, and the maximum magnetic field is near the wall, where
the electric field is at a minimum. During experimental
processing runs nitrogen gas was passed through the tube 22 to
avoid oxidation of metal samples at elevated temperatures.
A number of samples were prepared and sintered using the
experimental set up described above. The samples were centered
either at the electric field maximum node or at the magnetic
field maximum node. The electric field maximum region and the
magnetic field maximum region in the experimental set up
described above are separated by about 6 cm, hence, the sample
sizes of about 6.25mm (1/4 inch) diameter pellets are small. It
should be noted that depending on the size of the sample, it is
possible that the entire sample may not lie at the absolute
maximum of the magnetic field or electric field. For example, if
the maximum electric field is located at the center point of the
cavity, then part of the sample may be positioned exactly at the
center point, and part of the sample may be positioned slightly
adjacent to the center point. As such, the part that is
positioned slightly adjacent may not be exposed to the maximum
electric field and minimum magnetic field. As a result, when the
samples are described herein as being positioned at a"maximum"
field region or a"minimum"field region, or at a"pure"field
region, it is understood that a portion of the sample may be
positioned slightly adjacent to the maximum field point, minimum
field point, or pure field point.
A first sample was a commercial powdered metal having a
composition of Fe-2wt% Cu-0.8wt% C (obtained from Keystone
Powdered-Metal Company, Saint Marys, PA). In the pure or maximum
electric field region, the sample reached a maximum temperature
of 180 C after being microwave heated for 8 minutes, as seen in
Fig. 3 (a). In the maximum magnetic field region, the sample
heated up quickly and uniformly. The heating rate was higher
than 300 C per minute in the first two minutes, then it slowed
down. The final temperature reading was 780 C after 10 minutes.
A cobalt powder-compact sample displayed similar behavior to the
Fe2wt% Cu-0.8wt% C sample described above. There was little
heating effect in the maximum electric field region, with the
sample reaching a temperature of only about 150-200 C in 10
minutes. There was a high heating rate in the maximum magnetic
field region, with the sample reaching a temperature of about
550 C in about 2 minutes, and further increasing to a
temperature of about 700 C at 10 minutes, as seen in Fig. 3b.
A copper powder-compact sample was also tested and displayed
fast heating when placed in the maximum electric field region
and when placed in the maximum magnetic field region. As seen in
Fig, 3c, the sample temperature rose to about 600700 C and then
dropped down to-500 C and remained within the range of about
500-550 C during the heating. In the maximum electric field
region, the sample reached maximum temperature in about 1-2
minutes. In the magnetic field region, the same reached maximum
temperature in about 3-4 minutes.
For comparison to the copper powder-compact sample, a solid
copper bar with the same shape and size was tested to determine
its energy absorption and heating behavior (Fig. 3d). There was
little or no temperature rise in the solid copper bar in either
the maximum electric field region or the maximum magnetic field
region. After being exposed in the microwave field for 10
minutes, the sample remained at room temperature, as seen in
Fig. 3d.
Non-metal samples were also tested. Alumina is a typical ceramic
material with excellent dielectric properties. Alumina usually
has a very low dielectric loss, and it is generally not easy to
heat up by microwaves, particularly at lower temperatures. Since
the dielectric loss of alumina increases with temperature,
microwave heating of alumina becomes more efficient at high
temperature.
Alumina powder-compact samples doped with 0. 05wt% MgO (from
Baikowski
International, Charlotte, NC) were tested (Fig. 3e). In the
maximum electric field region, the heating rate speeded up after
the sample reached a temperature of about 400-500 C. In the
maximum magnetic field region, the alumina sample barely heated
up, as seen in Fig. 3e.
Tungsten carbide (from Teledyne) powder-compact samples were
also tested.
The WC samples exhibited different behavior than the alumina
samples. As seen in
Fig. 3f, the heating rate was rapid in the maximum magnetic
field region, reaching a maximum of about 700 C in 3-4 minutes
and then leveling out. In the maximum electric field region, the
heating rate was slow, and after 7 minutes of heating the sample
temperature was only about 180 C and there was some electrical
discharging around the sample.
Two types of composite samples were also tested, including
aluminapowdered metal (50% A1203 and 50% (Fe-2wt% Cu-0.8wt% C))
and tungsten carbide-cobalt (WC-10% Co).
For the alumina-metal composition, in the maximum magnetic field
region, the sample was rapidly heated to a temperature of about
900 C in about 1-2 minutes and then leveled out. In the maximum
electric field region, the reached a temperature of about 400 C
in about 2 minutes and then leveled out.
For the tungsten carbide-cobalt sample, in the maximum magnetic
field region, the sample was rapidly heated to a temperature of
about 400 C in about 2 minutes and then continued to increase to
a temperature of about 650 C in 10 minutes. In the maximum
electric field region, the sample was barely heated at all,
reaching a temperature of about 100 C in 10 minutes.
It should be noted that there was no insulation placed around
the samples, and as such, thermal loss was likely significant at
the higher temperatures, leading to lower heating rates at the
higher temperature ranges. In addition, for the experimental
set-up described above, it is believed that placing the center
of the sample within about 3 mm of the maximum or minimum field
point will yield similar results. In addition, a fixed microwave
power for testing runs was not used because for some samples,
the temperature increase was too fast to be measured with the
pyrometer, and for certain conditions, discharging and arcing
occurred. As a result, the samples were tested at the powers set
forth in Table 1 below.
Table I. Microwave power applied to
test materials.
Test Material Microwave Power
powdered metal compact (Fe-2% Cu-0.8% C) samples 200
cobalt powder-compact samples 150
copper powder-compact samples 150
solid copper rod samples 150
alumina powder-compact samples 180
tungsten carbide powder-compact samples 150
alumina-powder-compact metal composite samples 120
tungsten carbide-cobalt powder-compact samples 200
From the above results, it is apparent that different materials
have different heating behaviors in the electric and magnetic
field regions, and that exposure to either the electric field
alone or the magnetic field alone can be used for processing a
variety of materials. In general, the higher conductivity
samples, such as the powdered metal sample, can be more rapidly
and efficiently heated in the maximum magnetic field region. The
pure ceramic alumina sample with low conductivity exhibited a
more rapid and efficient heating rate in the maximum electric
field region.
Fig. 4 illustrates microstructures of a pure Cu powder compact
microwave heated in the maximum magnetic field region for 10
minutes, including (A) surface region with no sintering and
considerable porosity; (B) interlayer region with little
sintering and some porosity ; and (C) core region fully sintered
with little or no porosity. Fig. 5 shows a portion of the
experimental set-up during microwave heating of a Fe-Cu-C
powdered metal sample in the maximum magnetic field region.
Embodiments may find application in a variety materials
processing applications. For example, for certain types of
electronic devices it may be desirable to heat only a portion of
the device. By properly positioning the device, a particular
portion may be subjected to the maximum magnetic field or
electric field region in order to heat up the particular
portion. One example of an application would be to heat a metal
deposited on a ceramic substrate. By subjecting the metal to the
magnetic field region, it may be possible to heat the metal
while the ceramic is not heated, due to the different
interactions of the metal and the ceramic with the magnetic
field. Such a process may be suitable for activating catalysts,
processing semiconductor devices, forming coating, etc., where
different materials can be heated differently depending on their
interactions with the magnetic field or electric field generated
by the microwave processing system. Numerous materials may be
processed according to embodiments of the present invention,
including, but not limited to metals, ceramics, semiconductors,
superconductors, polymers, composites and glasses. The term
metals includes not only pure metals but also other materials
having metallic properties, such as alloys.
In semiconductor processing, it is sometimes necessary to heat a
particular layer in order to, for example, activating a dopant,
annealing a metal, causing reflow of an electrode, etc.
Microwave processing by exposing the necessary region to a
separate essentially pure magnetic field and/or electric field
enables one region to be heated while other regions, which may
be damaged by heat, are kept at a lower temperature. In
addition, it is possible to configure a processing system so
that a sample can be moved through the regions of maximum
magnetic and/or electric field as desired. Such a system may be
a stand alone processing system or attached to a larger
processing system having multiple processing chambers, such as a
semiconductor processing cluster tool.
It will, of course, be understood that modifications of the
present invention, in its various aspects, will be apparent to
those skilled in the art. The scope of the invention should not
be limited by the particular embodiments described herein.
Other embodiments are possible, their specific features
depending upon the particular application.